All-good-condition ultraviolet lasers are actually extensively Employed in the fields of mechanical flaw detection, lithography, micromachining and drugs for the benefits of little quantity, extended everyday living, significant effectiveness, fantastic beam top quality, large tuning and narrow spectral line, etc. Utilizing substantial energy close to-infrared coherent light-weight resource as the elemental frequency source based on nonlinear tuning technological innovation, making ultraviolet coherent radiation by multistage frequency conversion is thought to be a very important approach to produce the ultraviolet coherent mild source.
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The normal energy from the NIR laser however has the possible being enhanced to tens of watts like 70 W [26] In case the double-move configuration can be utilized with the Yb:YAG SCF amplifier stage. Consequently, In case the conversion performance of 31% from NIR to DUV could be nevertheless preserved at this higher electrical power situation, the typical output electrical power on the DUV laser at 258 nm could be much more than twenty W, which would be considered a exceptional electrical power level with the DUV laser and bring about the unanticipated DUV laser machining effects. Also, for prime-energy DUV laser, the UV damage of your nonlinear crystal, such as the windows for CLBO crystal and also the mirrors, is another vital parameter for lasting and steady Procedure.
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Due to the thermal lens result within the solid-condition lasers, In the event the heating administration is insufficient, It isn't quick to obtain the reliable-state laser with a high ability in addition to a substantial beam high quality at the same time. Lately, with the event of The skinny disk laser and single-crystal fiber (SCF) laser, a large-electric power laser at the elemental wavelength (1 μm) had been recognized with a good beam top quality Despite a TEM00 mode beam [4,24], which would be excellent candidates for the basic on the DUV laser era. A different applicant for the basic could be the superior-electrical power fiber laser which may very well be obtained by coherent beam mixture with M2 worth under 1.
On the other side, the facility scaling of your NIR laser is an additional element to increase the normal electricity of the 193-nm DUV laser. Due to the deficiency of the substantial-energy amplification Alternative in the NIR laser (for example at 1553 nm), nonlinear frequency processes such as optical parameter oscillation (OPO) may be placed on create a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength and obtaining relative bigger electrical power [21]. A short while ago, a diamond Raman laser confirmed its capacity in acquiring a higher electricity and a higher conversion effectiveness with the 1st Stokes on the 1-μm laser [22,23], which suggests the chance being utilized from the 193-nm DUV laser technology due to its higher Raman acquire and large frequency change.
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